KS-41B - Particle Counter

The KS-41B particle counter allows for the first time the counting and size classification of 70 nm particles in photoresists, SOG, ARC and other polymer solutions. In addition, it is a high-end liquid particle counter and the industry standard in ArC and immersions lithography.

Sophisticated calibration concepts document the extremely high counting efficiency of the system.

• Smallest channel 100 nm, (optional from 0.07 µm)
• Suitable for photoresist, SOC / SOG, ARC and other polymeric compounds
• Max 10 particle channels in the range between 0.1 and 0.5 µm (optional from 0.07 µm)
• Suitable for continuous online operation
• Suitable for batch operation